The new mask aligner is used to produce quantum chips for quantum computers based on ion traps. The backside alignment made possible by the new mask aligner is essential for this, as it allows the quantum chips to be aligned to the front and now also the back.
The mask aligner is funded and procured by the German Federal Ministry of Education and Research (BMBF) in the joint project MIQRO (‘Scalable Quantum Computer with Radio Frequency-Controlled Stored Ions’). It comes through the research group of Prof. Dr. Christian Ospelkaus (Institute of Quantum Optics at Leibniz University Hannover & Physikalisch-Technische Bundesanstalt).
The new mask aligner is an MA6 Gen4 from Süss MicroTec. It is used in the photolithography area for gold processes. The device description is listed on the LNQE website under the technology in the LNQE research building.
Further links:
